The fabrication and testing of an integrated micro-fluidic sample delivery system for polydimethylsiloxane (PDMS) micro-fluidic channel is reported. Adopting a multi-disciplinary approach to the establishment of core platform technologies, we brought together physical chemistry, biochemistry, surface science and micro-fabrication technology. The fluidic channel is designed in Mentor Graphics® IC layout, and transferred to a flexible transparency which will act as a photo-mask during contact photolithography. A negative photosensitive epoxy resin (SU-8 50) is dispensed and processed upon a silicon substrate. Exposure to a UV source permits the patterning of the epoxy resin, and the fabrication of a re-usable master mould. Casting the PDMS against the mould yields a polymeric replica containing the designed fluidic channel. Finally, the oxidation of the PDMS by a handheld tesla coil permits the irreversible bonding of the polydimethylsiloxane to a selected substrate. This micro fluidic channel was tested in thin film micro-sensor for clinical applications. Potential applications for this integrated micro-fluidic systems are also discussed.
